SMART (Simple Model for ALD Reaction and Transport) is a software developed by the Atomic Layer Deposition group at Argonne National Laboratory. Its aim is to provide a tool to understand the interplay between surface reaction and precursor transport during atomic layer deposition and how this translates into coverage profiles both in reactors and nanostructures.
SMART comes in two versions:
- The basic interface comprises two uncoupled models, one at the reactor and another at the feature scale.
- The advanced interface incorporates more features, including the possibility of loading experimental data, the presence of an overimposed CVD component, and a much faster model at the reactor scale in the plug-flow approximation, which allows the fitting of experimental profiles to extract effective reaction probabilities.
- The basic interface of SMART is released as freeware, but Argonne National Laboratory retains the copyright for the code.
- Licensing terms can change in the future, and the advanced interface may be licensed under different terms.